Thin film based sensor development
Development and characterization of sensors for chemical and physical quantities based on thin film sensors obtained via Plasma Enhanced Chemical Vapor Deposition. The research is carried out in cooperation with DISAT and with University of Messina.
ERC Sector:
- PE7_7 Signal processing
- PE7_11 Components and systems for applications
Keywords:
- Instrumentation and measurement/Computerized instrumentation
Research groups
Contact
- PARVIS MARCO - Manager
- CORBELLINI SIMONE
- GRASSINI SABRINA