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Andrini, G; Hernandez, En; Provatas, G; Brajkovic, M; Crnjac, A; Tchernij, Sd; Forneris, ... (2022)
An ion beam spot size monitor based on a nano-machined Si photodiode probed by means of the ion beam induced charge technique. In: VACUUM, vol. 205. ISSN 0042-207X
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